本文主要研究内容
作者杜安天（2019）在《金属掺杂氮化铌薄膜的制备及其特性研究》一文中研究指出：氮化铌（NbN）薄膜是一种硬质过渡金属氮化物（TMN）薄膜,具有高硬度,高耐磨性,高熔点和高化学稳定性等优点,其在金属切削和保护涂层等方面具有广泛的应用。本文采用射频磁控溅射技术制备了未掺杂和金属掺杂的NbN薄膜。利用X射线衍射（XRD）,能量色散X射线光谱（EDX）,扫描电子显微镜（SEM）,纳米压痕仪,高温摩擦磨损实验机分别对NbN薄膜的微观结构,组成成分,表面形貌,机械和摩擦学性能进行了研究。首先,采用射频磁控溅射技术制备了未掺杂的NbN薄膜。XRD测试结果表明,在衬底温度低于300℃的情况下,NbN薄膜没有明显的衍射峰,薄膜结晶性较差;当衬底温度升高到500℃,NbN薄膜沿（200）方向具有良好的生长趋势,薄膜结晶质量良好;随着氩气与氮气比率的降低,薄膜的结晶性逐渐增强,在氩氮比为20:4时,（200）方向衍射峰最高,薄膜结晶性最好;溅射压强也对薄膜的结晶性有较大的影响,随着压强的降低,薄膜的结晶性逐渐增强,在压强为0.4 Pa时具有最好的结晶性;通过改变溅射功率我们得知,随着溅射功率的增加,薄膜的结晶性逐渐增强。最佳结晶性的NbN薄膜的硬度仅为5.3 GPa,具有较高的摩擦系数,其值为0.73,磨损率较高达到3.3×10-6mm3/Nmm。其次,采用射频和直流磁控共溅射技术制备了 Ti掺杂NbN（Ti:NbN）三元薄膜以及Y-Ti共掺杂NbN（Y-Ti:NbN）四元薄膜。XRD测试结果表明,随着Ti掺杂功率从15 W逐渐升高到40 W,（200）方向的衍射峰强度先增加后下降,薄膜的结晶性先增加后降低。当掺杂功率为20 W时,衍射峰强度最大,薄膜的结晶性最好。随着掺杂功率增加,薄膜的硬度先增大后减小,在掺杂功率为30 W时具有最大的硬度值20.4 GPa。摩擦系数逐渐下降,而磨损率表现出相同的下降趋势。对于N bN（Y-Ti:NbN）四元薄膜,在掺杂功率为30 W时具有最大硬度,达到25.3 GPa,而摩擦系数随掺杂功率的增加呈现出逐渐下降的趋势,在掺杂功率为40 W时具有最小的摩擦系数0.29,此时的磨损率为2.38 × 106mm3/Nmm。除此之外,通过三元Ti:NbN薄膜与四元Y-Ti:NbN薄膜的性质对比,表明适量Y的掺入能够有效地提高NbN薄膜的机械及摩擦学性能。
Abstract
dan hua ni （NbN）bao mo shi yi chong ying zhi guo du jin shu dan hua wu （TMN）bao mo ,ju you gao ying du ,gao nai mo xing ,gao rong dian he gao hua xue wen ding xing deng you dian ,ji zai jin shu qie xiao he bao hu tu ceng deng fang mian ju you an fan de ying yong 。ben wen cai yong she pin ci kong jian she ji shu zhi bei le wei can za he jin shu can za de NbNbao mo 。li yong Xshe xian yan she （XRD）,neng liang se san Xshe xian guang pu （EDX）,sao miao dian zi xian wei jing （SEM）,na mi ya hen yi ,gao wen ma ca mo sun shi yan ji fen bie dui NbNbao mo de wei guan jie gou ,zu cheng cheng fen ,biao mian xing mao ,ji xie he ma ca xue xing neng jin hang le yan jiu 。shou xian ,cai yong she pin ci kong jian she ji shu zhi bei le wei can za de NbNbao mo 。XRDce shi jie guo biao ming ,zai chen de wen du di yu 300℃de qing kuang xia ,NbNbao mo mei you ming xian de yan she feng ,bao mo jie jing xing jiao cha ;dang chen de wen du sheng gao dao 500℃,NbNbao mo yan （200）fang xiang ju you liang hao de sheng chang qu shi ,bao mo jie jing zhi liang liang hao ;sui zhao ya qi yu dan qi bi lv de jiang di ,bao mo de jie jing xing zhu jian zeng jiang ,zai ya dan bi wei 20:4shi ,（200）fang xiang yan she feng zui gao ,bao mo jie jing xing zui hao ;jian she ya jiang ye dui bao mo de jie jing xing you jiao da de ying xiang ,sui zhao ya jiang de jiang di ,bao mo de jie jing xing zhu jian zeng jiang ,zai ya jiang wei 0.4 Pashi ju you zui hao de jie jing xing ;tong guo gai bian jian she gong lv wo men de zhi ,sui zhao jian she gong lv de zeng jia ,bao mo de jie jing xing zhu jian zeng jiang 。zui jia jie jing xing de NbNbao mo de ying du jin wei 5.3 GPa,ju you jiao gao de ma ca ji shu ,ji zhi wei 0.73,mo sun lv jiao gao da dao 3.3×10-6mm3/Nmm。ji ci ,cai yong she pin he zhi liu ci kong gong jian she ji shu zhi bei le Tican za NbN（Ti:NbN）san yuan bao mo yi ji Y-Tigong can za NbN（Y-Ti:NbN）si yuan bao mo 。XRDce shi jie guo biao ming ,sui zhao Tican za gong lv cong 15 Wzhu jian sheng gao dao 40 W,（200）fang xiang de yan she feng jiang du xian zeng jia hou xia jiang ,bao mo de jie jing xing xian zeng jia hou jiang di 。dang can za gong lv wei 20 Wshi ,yan she feng jiang du zui da ,bao mo de jie jing xing zui hao 。sui zhao can za gong lv zeng jia ,bao mo de ying du xian zeng da hou jian xiao ,zai can za gong lv wei 30 Wshi ju you zui da de ying du zhi 20.4 GPa。ma ca ji shu zhu jian xia jiang ,er mo sun lv biao xian chu xiang tong de xia jiang qu shi 。dui yu N bN（Y-Ti:NbN）si yuan bao mo ,zai can za gong lv wei 30 Wshi ju you zui da ying du ,da dao 25.3 GPa,er ma ca ji shu sui can za gong lv de zeng jia cheng xian chu zhu jian xia jiang de qu shi ,zai can za gong lv wei 40 Wshi ju you zui xiao de ma ca ji shu 0.29,ci shi de mo sun lv wei 2.38 × 106mm3/Nmm。chu ci zhi wai ,tong guo san yuan Ti:NbNbao mo yu si yuan Y-Ti:NbNbao mo de xing zhi dui bi ,biao ming kuo liang Yde can ru neng gou you xiao de di gao NbNbao mo de ji xie ji ma ca xue xing neng 。
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论文详细介绍
论文作者分别是来自延边大学的杜安天，发表于刊物延边大学2019-07-16论文，是一篇关于薄膜论文,磁控溅射论文,掺杂论文,机械性能论文,摩擦学性能论文,延边大学2019-07-16论文的文章。本文可供学术参考使用，各位学者可以免费参考阅读下载，文章观点不代表本站观点，资料来自延边大学2019-07-16论文网站，若本站收录的文献无意侵犯了您的著作版权，请联系我们删除。